MKS Mass flow controller 1179A01312CR1AV

MKS Mass flow controller 1179A01312CR1AV

Tested and in good condition

The 1179C01312CR1BV is a general purpose mass flow controller with an Viton seal, rated for 100 sccm Full Scale (N2), with 4 VCR male fittings, and a 15-pin D-sub electrical connector. It is designed to measure and control the flow of gases in a wide variety of applications. 1179 Mass-Flo® controllers can also be used as a pressure controller when connected to a suitable pressure transducer.  The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.

Technical Specs

Type: Mass Flow Controller
Calibration Gas: N2 (or equivalent)
Control Range: 2 - 100 sccm
Full Scale Flow Range: 100 sccm
Fitting Type: 4 VCR male
Flow Input Output Signal: 0 - 5 VDC
Analog I/O Connector: 15-pin D-sub
Seal Material: Viton
Maximum Inlet Pressure: 150 psig
Normal Operating Pressure Differential: 10 - 40 psid (with atmospheric pressure at the MFC outlet)
Typical Accuracy: ±1.0% of Full Scale (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
Repeatability: <0.05% of Full Scale/°C
Resolution: <0.08% of Reading/°C
Zero Temperature Coefficient: <0.05% of Full Scale/°C
Span Temperature Coefficient: <0.08% of Reading/°C
Warm-up Time: <2 min (to within 0.2% of Full Scale of steady state performance)
Typical Settling Time: <2 sec (per SEMI Guideline E17-91)
Operating Temperature: 0 - 50°C
Set Point Command Signal: 0 - 5 VDC from <20 kOhm
Wetted Materials: 316L stainless steel, Viton®, nickel
External Leak Integrity: <1 x 10
Leak Integrity Through Closed Valve: <1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended.)
Compliance: CE
Maximum Current Required at Start-up: ±15 VDC (±5%) @ 200 mA
Typical Current Required at Steady State: ±15 VDC (±5%) @ 100 mA
Valve State: Normally closed